Authors: C.V. RamanaBum Sik ChoiR.J. SmithR. HutchisonS. P. StukByoung Suk ParkAdli A. SalehDong Ryul JeonJ. Vac. SciJournal Name: TechnolVolume: 1Issue: 1Pages From: 1326To: 1326Date: Wednesday, January 1, 2003