High deposition rate a-Si:H for the flat panel display industry

Authors:

J. Hautala, Z. M. Saleh, J.F.M. Westendorp, H. Meiling, S. Sherman and S. Wagner

ISSN:

0000-0000

Journal Name:

Proc. of the Materials Research Society

Volume:

10

Issue:

1

Pages From:

1

To:

5

Date:

Wednesday, January 1, 1997