Authors: Adli A.SalehHanan Z.HamameraHazem K.KhanfarA.F.QasrawiG.YumusakISSN: 1369-8001Journal Name: Materials Science in Semiconductor ProcessingVolume: 88Issue: 0Pages From: 256To: 261Date: Saturday, December 1, 2018External Link: https://doi.org/10.1016/j.mssp.2018.08.017